| Keyword search (4,163 papers available) | ![]() |
"electrostatic comb drive" Keyword-tagged Publications:
| Title | Authors | PubMed ID | |
|---|---|---|---|
| 1 | Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics | Fasihanifard M; Packirisamy M; | 41156349 ENCS |



