Author(s): Fasihanifard M; Packirisamy M;

Actuating monolithic photonic components (particularly slab waveguides) requires higher force due to their inherent stiffness. However, two primary constraints must be addressed: actuator footprint and fabrication limits. Increasing the number of fingers to provide the required force is not a viable solution due to space constraints, and we must also adhe ...

Article GUID: 41156349

Author(s): Fasihanifard M; Packirisamy M;

This paper presents an in-depth analysis of electrostatic comb drives, specifically focusing on angled finger configurations to optimize performance for high-demand silicon photonic devices. The study contributes to the advancement of optical microsystems, particularly for beam steering configurations, by simultaneously considering three key figures of me ...

Article GUID: 41130948