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Title Authors PubMed ID
1 Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics Fasihanifard M; Packirisamy M; 41156349
ENCS
2 Wideband Dual-Polarized PRGW Antenna Array with High Isolation for Millimeter-Wave IoT Applications Mousavirazi Z; Ali MMM; Sebak AR; Denidni TA; 40968922
ENCS
3 How do we know that they actually use it? Exploring measures of adherence to stress management strategies in university students: A systematic review Bastien L; Cho S; Petrovic J; Khoury B; Bloom E; Heath N; 40895119
PSYCHOLOGY
4 ASSOBRAFIR clinical practice guidelines in cardiovascular physical therapy: Exercise-based interventions in outpatient rehabilitation programs for heart failure Karsten M; Gardenghi G; Arruda ACT; Catai AM; Vieira AM; Stein C; de Araujo CLP; Pereira DAG; Matte DL; da Silva FMF; Guimarães FS; Ghisi GLM; Chiappa GRS; Sbruzzi G; Cipriano GFB; Ribeiro GDS; Milani JGPO; Neves LMT; Calegari L; Morais LA; Capalonga L; Deresz LF; Lago PD; Campos PS; Macedo RM; Plentz RDM; Menezes SLS; Filho VPPS; Silva VZM; Carvalho VO; Medeiros WM; Lanza FC; Cipriano G; 40857977
HKAP
5 Assessment of cognitive load in the context of neurosurgery Di Giovanni DA; Kersten-Oertel M; Drouin S; Collins DL; 40650801
PERFORM
6 Emerging Image-Guided Navigation Techniques for Cardiovascular Interventions: A Scoping Review Roshanfar M; Salimi M; Jang SJ; Sinusas AJ; Kim J; Mosadegh B; 40428106
ENCS
7 PreVISE: an efficient virtual reality system for SEEG surgical planning Spiegler P; Abdelsalam H; Hellum O; Hadjinicolaou A; Weil AG; Xiao Y; 39735694
ENCS
8 Dual-Band Antenna Array Fed by Ridge Gap Waveguide with Dual-Periodic Interdigital-Pin Bed of Nails Chen B; Chen X; Cheng X; Da Y; Liu X; Gao S; Kishk AA; 39204813
ENCS
9 A decade of progress: bringing mixed reality image-guided surgery systems in the operating room Asadi Z; Asadi M; Kazemipour N; Léger É; Kersten-Oertel M; 38794834
ENCS
10 Martin Buber: guide for a psychology of suffering Tweed RG; Bergen TP; Castaneto KK; Ryder AG; 37251029
PSYCHOLOGY
11 Transparency and completeness of reporting of depression screening tool accuracy studies: A meta-research review of adherence to the Standards for Reporting of Diagnostic Accuracy Studies statement Nassar EL; Levis B; Neyer MA; Rice DB; Booij L; Benedetti A; Thombs BD; 36047034
PSYCHOLOGY
12 Efficacy of a minimally guided internet treatment for alcohol misuse and emotional problems in young adults: Results of a randomized controlled trial Frohlich JR; Rapinda KK; Schaub MP; Wenger A; Baumgartner C; Johnson EA; O' Connor RM; Vincent N; Blankers M; Ebert DD; Hadjistavropoulos HD; Mackenzie CS; Wardell JD; Augsburger M; Goldberg JO; Keough MT; 34938848
PSYCHOLOGY
13 Towards a better understanding of deep convolutional neural network processes for recognizing organic chemicals of environmental concern Sun X; Zhang X; Wang L; Li Y; Muir DCG; Zeng EY; 34388923
CHEMBIOCHEM
14 Improving 3D ultrasound prostate localisation in radiotherapy through increased automation of interfraction matching. Grimwood A, Rivaz H, Zhou H, McNair HA, Yakubowski K, Bamber JC, Tree AC, Harris EJ 32387546
PHYSICS
15 MARIN: an open-source mobile augmented reality interactive neuronavigation system. Léger É; Reyes J; Drouin S; Popa T; Hall JA; Collins DL; Kersten-Oertel M; 32323206
PERFORM
16 Implementing deprescribing guidelines into frontline practice: Barriers and facilitators. Conklin J, Farrell B, Suleman S 30241874
CONCORDIA
17 Deprescribing guidelines: An international symposium on development, implementation, research and health professional education. Farrell B, Conklin J, Dolovich L, Irving H, Maclure M, McCarthy L, Moriarty F, Pottie K, Raman-Wilms L, Reeve E, Thompson W 30241875
CONCORDIA
18 Deprescribing: Future directions for research. Thompson W, Reeve E, Moriarty F, Maclure M, Turner J, Steinman MA, Conklin J, Dolovich L, McCarthy L, Farrell B 30241876
CONCORDIA
19 Characteristics of Canadian Youth Adhering to Physical Activity and Screen Time Recommendations. Fitzpatrick C, Burkhalter R, Asbridge M 31630617
PERFORM
20 Quantifying attention shifts in augmented reality image-guided neurosurgery. Léger É, Drouin S, Collins DL, Popa T, Kersten-Oertel M 29184663
PERFORM
21 Distance sonification in image-guided neurosurgery. Plazak J, Drouin S, Collins L, Kersten-Oertel M 29184665
PERFORM
22 Combining intraoperative ultrasound brain shift correction and augmented reality visualizations: a pilot study of eight cases. Gerard IJ, Kersten-Oertel M, Drouin S, Hall JA, Petrecca K, De Nigris D, Di Giovanni DA, Arbel T, Collins DL 29392162
PERFORM
23 Gesture-based registration correction using a mobile augmented reality image-guided neurosurgery system. Léger É, Reyes J, Drouin S, Collins DL, Popa T, Kersten-Oertel M 30800320
PERFORM

 

Title:Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics
Authors:Fasihanifard MPackirisamy M
Link:https://pubmed.ncbi.nlm.nih.gov/41156349/
DOI:10.3390/mi16101102
Publication:Micromachines
Keywords:MEMS actuatorselectrostatic comb driveforce intensity optimizationsilicon photonicsslab waveguide actuation
PMID:41156349 Category: Date Added:2025-10-29
Dept Affiliation: ENCS
1 Optical-Bio Microsystems Laboratory, Department of Mechanical, Industrial and Aerospace Engineering, Concordia University, 1515 St. Catherine W., Montreal, QC H3G 2W1, Canada.

Description:

Actuating monolithic photonic components (particularly slab waveguides) requires higher force due to their inherent stiffness. However, two primary constraints must be addressed: actuator footprint and fabrication limits. Increasing the number of fingers to provide the required force is not a viable solution due to space constraints, and we must also adhere to the process design kits of standard fabrications and respect their design limits. Therefore, it is crucial to increase the actuator force output without significantly enlarging the actuator footprint while maintaining the necessary travel range. In order to achieve this, we utilize arrays of electrostatic comb drives, with each repeating cell geometry optimized to produce the highest force per actuator footprint. Our optimization strategy focuses on finger geometry, the arrangement of fingers and arms design in the comb structure, including the number of fingers per arm and arm length, ensuring that each repeating cell delivers maximum force per unit area or force intensity. Co-optimizing a repeatable, footprint-optimized comb-array unit cell (arm length, arm width, finger pitch, finger count) and validating it against an asymmetric slab waveguide load, we reach a maximum pre-pull-in force intensity of about 342 N m-2 at 70 V with about 6 µm travel, confirmed by analytical modeling, numerical simulation, and measurement. Despite fabrication challenges such as over-etching and variations in electrode dimensions, detailed SEM analyses and correction functions ensure that the theoretical models closely match the experimental data, confirming the robustness and accuracy of the design. These optimized actuators, capable of achieving substantial force output without sacrificing travel range or mechanical stability, are particularly effective for applications in optical beam steering for in-plane silicon-photonics and related optical microsystems applications.





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