| Keyword search (4,163 papers available) | ![]() |
"guide" Keyword-tagged Publications:
| Title | Authors | PubMed ID | |
|---|---|---|---|
| 1 | Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics | Fasihanifard M; Packirisamy M; | 41156349 ENCS |
| 2 | Wideband Dual-Polarized PRGW Antenna Array with High Isolation for Millimeter-Wave IoT Applications | Mousavirazi Z; Ali MMM; Sebak AR; Denidni TA; | 40968922 ENCS |
| 3 | How do we know that they actually use it? Exploring measures of adherence to stress management strategies in university students: A systematic review | Bastien L; Cho S; Petrovic J; Khoury B; Bloom E; Heath N; | 40895119 PSYCHOLOGY |
| 4 | ASSOBRAFIR clinical practice guidelines in cardiovascular physical therapy: Exercise-based interventions in outpatient rehabilitation programs for heart failure | Karsten M; Gardenghi G; Arruda ACT; Catai AM; Vieira AM; Stein C; de Araujo CLP; Pereira DAG; Matte DL; da Silva FMF; Guimarães FS; Ghisi GLM; Chiappa GRS; Sbruzzi G; Cipriano GFB; Ribeiro GDS; Milani JGPO; Neves LMT; Calegari L; Morais LA; Capalonga L; Deresz LF; Lago PD; Campos PS; Macedo RM; Plentz RDM; Menezes SLS; Filho VPPS; Silva VZM; Carvalho VO; Medeiros WM; Lanza FC; Cipriano G; | 40857977 HKAP |
| 5 | Assessment of cognitive load in the context of neurosurgery | Di Giovanni DA; Kersten-Oertel M; Drouin S; Collins DL; | 40650801 PERFORM |
| 6 | Emerging Image-Guided Navigation Techniques for Cardiovascular Interventions: A Scoping Review | Roshanfar M; Salimi M; Jang SJ; Sinusas AJ; Kim J; Mosadegh B; | 40428106 ENCS |
| 7 | PreVISE: an efficient virtual reality system for SEEG surgical planning | Spiegler P; Abdelsalam H; Hellum O; Hadjinicolaou A; Weil AG; Xiao Y; | 39735694 ENCS |
| 8 | Dual-Band Antenna Array Fed by Ridge Gap Waveguide with Dual-Periodic Interdigital-Pin Bed of Nails | Chen B; Chen X; Cheng X; Da Y; Liu X; Gao S; Kishk AA; | 39204813 ENCS |
| 9 | A decade of progress: bringing mixed reality image-guided surgery systems in the operating room | Asadi Z; Asadi M; Kazemipour N; Léger É; Kersten-Oertel M; | 38794834 ENCS |
| 10 | Martin Buber: guide for a psychology of suffering | Tweed RG; Bergen TP; Castaneto KK; Ryder AG; | 37251029 PSYCHOLOGY |
| 11 | Transparency and completeness of reporting of depression screening tool accuracy studies: A meta-research review of adherence to the Standards for Reporting of Diagnostic Accuracy Studies statement | Nassar EL; Levis B; Neyer MA; Rice DB; Booij L; Benedetti A; Thombs BD; | 36047034 PSYCHOLOGY |
| 12 | Efficacy of a minimally guided internet treatment for alcohol misuse and emotional problems in young adults: Results of a randomized controlled trial | Frohlich JR; Rapinda KK; Schaub MP; Wenger A; Baumgartner C; Johnson EA; O' Connor RM; Vincent N; Blankers M; Ebert DD; Hadjistavropoulos HD; Mackenzie CS; Wardell JD; Augsburger M; Goldberg JO; Keough MT; | 34938848 PSYCHOLOGY |
| 13 | Towards a better understanding of deep convolutional neural network processes for recognizing organic chemicals of environmental concern | Sun X; Zhang X; Wang L; Li Y; Muir DCG; Zeng EY; | 34388923 CHEMBIOCHEM |
| 14 | Improving 3D ultrasound prostate localisation in radiotherapy through increased automation of interfraction matching. | Grimwood A, Rivaz H, Zhou H, McNair HA, Yakubowski K, Bamber JC, Tree AC, Harris EJ | 32387546 PHYSICS |
| 15 | MARIN: an open-source mobile augmented reality interactive neuronavigation system. | Léger É; Reyes J; Drouin S; Popa T; Hall JA; Collins DL; Kersten-Oertel M; | 32323206 PERFORM |
| 16 | Implementing deprescribing guidelines into frontline practice: Barriers and facilitators. | Conklin J, Farrell B, Suleman S | 30241874 CONCORDIA |
| 17 | Deprescribing guidelines: An international symposium on development, implementation, research and health professional education. | Farrell B, Conklin J, Dolovich L, Irving H, Maclure M, McCarthy L, Moriarty F, Pottie K, Raman-Wilms L, Reeve E, Thompson W | 30241875 CONCORDIA |
| 18 | Deprescribing: Future directions for research. | Thompson W, Reeve E, Moriarty F, Maclure M, Turner J, Steinman MA, Conklin J, Dolovich L, McCarthy L, Farrell B | 30241876 CONCORDIA |
| 19 | Characteristics of Canadian Youth Adhering to Physical Activity and Screen Time Recommendations. | Fitzpatrick C, Burkhalter R, Asbridge M | 31630617 PERFORM |
| 20 | Quantifying attention shifts in augmented reality image-guided neurosurgery. | Léger É, Drouin S, Collins DL, Popa T, Kersten-Oertel M | 29184663 PERFORM |
| 21 | Distance sonification in image-guided neurosurgery. | Plazak J, Drouin S, Collins L, Kersten-Oertel M | 29184665 PERFORM |
| 22 | Combining intraoperative ultrasound brain shift correction and augmented reality visualizations: a pilot study of eight cases. | Gerard IJ, Kersten-Oertel M, Drouin S, Hall JA, Petrecca K, De Nigris D, Di Giovanni DA, Arbel T, Collins DL | 29392162 PERFORM |
| 23 | Gesture-based registration correction using a mobile augmented reality image-guided neurosurgery system. | Léger É, Reyes J, Drouin S, Collins DL, Popa T, Kersten-Oertel M | 30800320 PERFORM |
| Title: | Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics | ||||
| Authors: | Fasihanifard M, Packirisamy M | ||||
| Link: | https://pubmed.ncbi.nlm.nih.gov/41156349/ | ||||
| DOI: | 10.3390/mi16101102 | ||||
| Publication: | Micromachines | ||||
| Keywords: | MEMS actuators; electrostatic comb drive; force intensity optimization; silicon photonics; slab waveguide actuation; | ||||
| PMID: | 41156349 | Category: | Date Added: | 2025-10-29 | |
| Dept Affiliation: |
ENCS
1 Optical-Bio Microsystems Laboratory, Department of Mechanical, Industrial and Aerospace Engineering, Concordia University, 1515 St. Catherine W., Montreal, QC H3G 2W1, Canada. |
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Description: |
Actuating monolithic photonic components (particularly slab waveguides) requires higher force due to their inherent stiffness. However, two primary constraints must be addressed: actuator footprint and fabrication limits. Increasing the number of fingers to provide the required force is not a viable solution due to space constraints, and we must also adhere to the process design kits of standard fabrications and respect their design limits. Therefore, it is crucial to increase the actuator force output without significantly enlarging the actuator footprint while maintaining the necessary travel range. In order to achieve this, we utilize arrays of electrostatic comb drives, with each repeating cell geometry optimized to produce the highest force per actuator footprint. Our optimization strategy focuses on finger geometry, the arrangement of fingers and arms design in the comb structure, including the number of fingers per arm and arm length, ensuring that each repeating cell delivers maximum force per unit area or force intensity. Co-optimizing a repeatable, footprint-optimized comb-array unit cell (arm length, arm width, finger pitch, finger count) and validating it against an asymmetric slab waveguide load, we reach a maximum pre-pull-in force intensity of about 342 N m-2 at 70 V with about 6 µm travel, confirmed by analytical modeling, numerical simulation, and measurement. Despite fabrication challenges such as over-etching and variations in electrode dimensions, detailed SEM analyses and correction functions ensure that the theoretical models closely match the experimental data, confirming the robustness and accuracy of the design. These optimized actuators, capable of achieving substantial force output without sacrificing travel range or mechanical stability, are particularly effective for applications in optical beam steering for in-plane silicon-photonics and related optical microsystems applications. |



